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A Route to MoO2 film fabrication via atomic layer deposition using Mo(IV) precursor and oxygen reactant for DRAM applications Go to Link

Yoon, Ara; Yang, Hae Lin; Lee, Sanghoon; Lee, Seunghwan; Kim, Beomseok; Jung, Changhwa; Lim, Hanjin; Park, Jin-Seong

ArticleIssue Date2024CitationCeramics International, v.50, no.8, pp 13841 - 13848PublisherElsevier

SCIESCOPUS

A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon–tin oxide by atomic layer deposition Go to Link

Han, Ju-Hwan; Kim, Dong-Yeon; Lee, Seunghwan; Yang, Hae Lin; Park, Byung Ho; Park, Jin-Seong

ArticleIssue Date2021CitationCeramics International, v.47, no.24, pp.34774 - 34782PublisherElsevier Ltd

SCIESCOPUS

Advanced indicone Nanostructuring: Surface engineering with small molecule inhibitors through molecular layer deposition Go to Link

Yang, Hae Lin; Park, Gi-Beom; Baek, Geonho; Park, Jinhong; Heo, Kwang; Park, Bo Keun; Lee, Jung-Hoon; Ahn, Jinho; Park, Jin-Seong

ArticleIssue Date2025CitationApplied Surface Science, v.684, pp 1 - 9PublisherElsevier BV

SCIESCOPUS

Atomic layer processing for Ångström-scale precision in 3D-integrated semiconductor manufacturing Go to Link open access

Yang, Hae Lin; Kim, Min Chan; Park, Gi-Beom; Park, Ji-Yeon; Park, Hyein; Shin, Jihoon; Ahn, Jinho; Park, Jin-Seong

ArticleIssue Date2026CitationINTERNATIONAL JOURNAL OF EXTREME MANUFACTURING, v.8, no.4, pp 1 - 11PublisherIOP Publishing Ltd

SCIESCOPUS

Atomic-Layer-Deposited SiOx/SnOx Nanolaminate Structure for Moisture and Hydrogen Gas Diffusion Barriers

Han, Ju-Hwan; Lee, Seong-Hyeon; Jeong, Seok-Goo; Kim, Dong-Yeon; Yang, Hae Lin; Lee, Seunghwan; Yoo, Seung Yeon; Park, Inho; Park, Ho Bum; Lim, Kwang-Su, et al.

ArticleIssue Date2021CitationACS APPLIED MATERIALS & INTERFACES, v.13, no.33, pp.39584 - 39594PublisherAMER CHEMICAL SOC

SCIESCOPUS

Boosted growth rate using discrete reactant feeding method and novel precursor of indium oxide by atomic layer deposition Go to Link

Yang, Hae Lin; Kim, Hye-Mi; KAMIMURA, Sunao; EIZAWA, Aya; TERAMOTO, Takashi; DUSSARRAT, Christian; ONO, Takashi; Park, Jin-Seong

ArticleIssue Date2024CitationApplied Surface Science, v.654, pp 1 - 9PublisherElsevier BV

SCIESCOPUS

Crystallinity-Preserving Atomic Layer Etching of Ultrathin In2O3 for Stable Oxide Nanoelectronics Go to Link

Kim, Min Chan; Yang, Hae Lin; Gwoen, Ji Hyun; Shin, Seong-A.; Kim, Min-Seo; Park, Jin-Seong

ArticleIssue Date2025CitationACS Nano, v.19, no.45, pp 39362 - 39370PublisherAMER CHEMICAL SOC

SCIESCOPUS

Graphitization of tincone via molecular layer deposition: investigating sulfur's role and structural impacts Go to Link

Jung, Hyolim; Yang, Hae Lin; Park, Gi-Beom; Kim, Ji-Min; Park, Jin-Seong

ArticleIssue Date2025CitationDalton Transactions, v.54, no.17, pp 7095 - 7104PublisherRoyal Society of Chemistry

SCIESCOPUS

Investigation of silicon nitride for spacer via plasma-enhanced atomic layer deposition using a (tert-butylamino)dimethylsilane precursor Go to Link

Park, Chae-Yeon; Yang, Hae Lin; Kim, Hye-Mi; Kim, Daejung; Park, Yongjoo; Park, Jongruyl; Shin, Seokhee; Park, Jin-Seong

ArticleIssue Date2024CitationApplied Surface Science, v.670, pp 1 - 10PublisherElsevier BV

SCIESCOPUS

Synthesis of low-k SiONC thin films by plasma-assisted molecular layer deposition with tetraisocyanatesilane and phloroglucinol Go to Link

Park, Gi-Beom; Yang, Hae Lin; Kim, Ji Min; Jung, Hyolim; Baek, Geonho; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2024CitationNanotechnology, v.35, no.40, pp 1 - 10PublisherInstitute of Physics Publishing

SCIESCOPUS

Thermally Stable Crystalline InGaO Channels via Optimized ALD for Advanced DRAM Applications Go to Link

Kim, Dong-Gyu; Oh, Hye-Jin; Yang, Hae Lin; Kho, Jihyun; Kim, Yurim; Kuh, Bong Jin; Park, Jin-Seong

ArticleIssue Date2025CitationACS Applied Electronic Materials, v.7, no.11, pp 5304 - 5315PublisherAMER CHEMICAL SOC

SCIESCOPUS

Unlocking the synergy of ALD and ALE: tailoring crystallinity and etch rates in ZnO thin films at the atomic scale Go to Link

Gwoen, Ji Hyun; Yang, Hae Lin; Kim, Min Chan; Jeong, Gyeong Min; Kim, Tae Kyung; Visser, Cas; Kessels, Wilhelmus M.M. (Erwin); Park, Jin-Seong

ArticleIssue Date2026CitationApplied Surface Science, v.717, pp 1 - 10PublisherElsevier BV

SCIESCOPUS

Unveiling growth mechanisms of PEALD In2O3 thin films with amide-based versus alkyl-based novel indium precursors Go to Link

Jeong, Gyeong Min; Yang, Hae Lin; Yoon, Ara; Kim, Yoon-Seo; Lee, Sangick; Kwone, Yonghee; Jeon, Sangyong; Im, Youngjae; Park, Jin-Seong

ArticleIssue Date2024CitationJournal of Materials Chemistry C, v.12, no.28, pp 10575 - 10584PublisherRoyal Society of Chemistry

SCIESCOPUS

Water vapor and hydrogen gas diffusion barrier characteristics of Al2O3-alucone multi-layer structures for flexible OLED display applications

Han, Ju-Hwan; Kim, Tae-Yeon; Kim, Dong-Yeon; Yang, Hae Lin; Park, Jin-Seong

ArticleIssue Date2021CitationDALTON TRANSACTIONS, v.50, no.43, pp.15841 - 15848PublisherROYAL SOC CHEMISTRY

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Browsing by Yang, Hae LinAuthor

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