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Advanced atmospheric-pressure spatial atomic layer deposition for OLED encapsulation: Controlling growth dynamics for superior film performance

Lee, Chi-Hoon; Yoo, Kwang Su; Kim, Daejung; Kim, Ji-Min; Park, Jin-Seong

ArticleIssue Date2025CitationChemical Engineering Journal, v.503, pp 1 - 10PublisherElsevier BV
SCIESCOPUS
Atmospheric pressure spatial ALD of Al2O3 thin films for flexible PEALD IGZO TFT applicationGo to Link

Yoo, Kwang Su; 김동규; Lee, Seunghwan; 이원범; Park, Jin-Seong

ArticleIssue Date2022CitationCERAMICS INTERNATIONAL, v.48, no.13, pp 18803 - 18810PublisherELSEVIER SCI LTD
SCIESCOPUSKCI
Compositionally engineered amorphous InZnO thin-film transistor with high mobility and stability via atmospheric pressure spatial atomic layer depositionGo to Link

Lee, Chi-Hoon; Yoo, Kwang Su; Kim, Dong-Gyu; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2024CitationJournal of Industrial and Engineering Chemistry, v.140, pp 269 - 276Publisher한국공업화학회
SCIESCOPUS
High mobility and productivity of flexible In2O3 thin-film transistors on polyimide substrates via atmospheric pressure spatial atomic layer depositionGo to Link

Yoo, Kwang Su; 이치훈; 김동규; Choi, Su-Hwan; 이원범; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2024CitationApplied Surface Science, v.646, pp 1 - 9PublisherElsevier BV
SCIESCOPUS
High-throughput and performance InZnAlO thin film transistor on polyimide substrate via atmospheric pressure spatial atomic layer depositionGo to Link

Kim, Daejung; Yoo, Kwang Su; Lee, Chi-Hoon; Kim, Ji-Min; Kim, Dong-Gyu; Lee, Hyeon-Woo; Kwon, Hyuck-In; Park, Jin-Seong

ArticleIssue Date2025CitationJournal of Alloys and Compounds, v.1023, pp 1 - 8PublisherElsevier BV
SCIESCOPUS
Impact of N2O Plasma Reactant on PEALD-SiO2 Insulator for Remarkably Reliable ALD-Oxide Semiconductor TFTsGo to Link

Kim, Dong-Gyu; Yoo, Kwang Su; 김혜미; Park, Jin-Seong

ArticleIssue Date2022CitationIEEE Transactions on Electron Devices, v.69, no.6, pp 3199 - 3205PublisherInstitute of Electrical and Electronics Engineers
SCOPUS
Nitrogen behaviors in peald-grown sio2 films using n2o plasma reactant and its application in ald-izo tftsGo to Link

김동규; Yoo, Kwang Su; Kim, Hye-Mi; Park, Jin-Seong

ArticleIssue Date2022CitationDigest of Technical Papers - SID International Symposium, v.53, no.1, pp 1043 - 1046
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