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Aspect ratio-dependent leaning of a block array in 3D NAND flash memoryGo to Link

Kim, Beomsu; Yoon, Dong-Gwan; Sim, Jae-Min; Song, Yun-Heub

ArticleIssue Date2024CitationMicroelectronics and Reliability, v.158, pp 1 - 5PublisherElsevier Ltd
SCIESCOPUS
Impact of Residual Stress on a Polysilicon Channel in Scaled 3D NAND Flash MemoryGo to Linkopen access

Lee, Juyoung; Yoon, Dong-Gwan; Sim, Jae-Min; Song, Yun-Heub

ArticleIssue Date2021CitationELECTRONICS, v.10, no.21, pp.1 - 6PublisherMDPI
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