Self-stopping slurry for planarizing extremely high surface film topography in nanoscale semiconductor devices
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Son, Young-Hye | - |
dc.contributor.author | Park, Jea-Gun | - |
dc.contributor.author | Choo, Byoung-Kwon | - |
dc.contributor.author | Kang, Seung-bae | - |
dc.date.accessioned | 2021-07-30T04:43:06Z | - |
dc.date.available | 2021-07-30T04:43:06Z | - |
dc.date.created | 2021-07-14 | - |
dc.date.issued | 2021-07 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/1009 | - |
dc.description.abstract | In this study, a novel chemical-mechanical planarization (CMP) slurry that can perform self-stop polishing was designed. The essential aspects for self-stop polishing are precise design of a nonionic polymer type, molecular weight, and molecular concentration of a self-stopping chemical agent. A good example is polyvinylpyrrolidone (PVP) with a molecular weight of 1300 k and molecular concentration of 0.3 wt%. In this chemical design, the adsorption of a polymer hindrance layer on the surface film topography during CMP can become sufficient under self-stop conditions such as a specific polishing time (e.g., 4 min). The self-stop polishing mechanism is associated with the presence of a relative local pressure difference on the surface film topography. The proper adsorption of the polymer hindrance layer on the surface topography can achieve a uniform relative local pressure distribution globally, and the film polishing rate can achieve adequate planarization of the surface film topography. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.title | Self-stopping slurry for planarizing extremely high surface film topography in nanoscale semiconductor devices | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jea-Gun | - |
dc.identifier.doi | 10.1007/s40042-021-00207-x | - |
dc.identifier.scopusid | 2-s2.0-85107398251 | - |
dc.identifier.wosid | 000658130300003 | - |
dc.identifier.bibliographicCitation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.79, no.1, pp.44 - 48 | - |
dc.relation.isPartOf | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.title | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.volume | 79 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 44 | - |
dc.citation.endPage | 48 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Early Access | - |
dc.identifier.kciid | ART002737801 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
dc.subject.keywordAuthor | Chemical-mechanical planarization (CMP) | - |
dc.subject.keywordAuthor | CMP slurry | - |
dc.subject.keywordAuthor | Self-stopping | - |
dc.subject.keywordAuthor | Ceria | - |
dc.subject.keywordAuthor | Polyvinylpyrrolidone | - |
dc.identifier.url | https://link.springer.com/article/10.1007/s40042-021-00207-x | - |
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