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저지구온난화지수를 가진 CF3I를 이용한 SiO2의 Atomic layer etching
- Authors
- 안진호
- Issue Date
- 13-Feb-2020
- Place
- 강원도 하이원리조트
- Conference Name
- 2020 반도체학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)