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RF 플라즈마에서 왜곡된 랑뮤어 탐침 I-V곡선의 수치적 왜곡 제거 방법 연구

Authors
정진욱
Issue Date
9-Feb-2020
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/10300
Place
하이원리조트
Conference Name
제58회 동계정기학술대회
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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Chung, Chin Wook
COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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