Air-stable alucone thin films deposited by molecular layer deposition using a 4-mercaptophenol organic reactant
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Baek, GeonHo | - |
dc.contributor.author | Lee, Seunghwan | - |
dc.contributor.author | Lee, Jung-Hoon | - |
dc.contributor.author | Park, Jin-Seong | - |
dc.date.accessioned | 2021-08-02T09:51:37Z | - |
dc.date.available | 2021-08-02T09:51:37Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2020-03 | - |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/10598 | - |
dc.description.abstract | Molecular layer deposition (MLD) is a thin film technique to make a pure organic coating or hybrid organic-inorganic film, sequentially dosing organic-organic or organic-inorganic precursors, respectively. In this study, hybrid organic-inorganic alucone films were fabricated via MLD using 4-mercaptophenol and trimethylaluminum as organic and metal precursors, respectively, over the deposition temperature range of 100-200 degrees C. The fabricated film was very stable without degradation when exposed to the atmosphere, and the characteristic change was confirmed through annealing under vacuum at 300-750 degrees C. After annealing, the thickness of the alucone films decreased and the bonding of the carbon ring changed, as revealed by the spectroscopic ellipsometer, Fourier-transform infrared, Raman, x-ray diffraction, and x-ray photoelectron spectroscopy results. The annealed alucone films showed thermal polymerization, and their carbon ring structures transformed into graphitic carbon flakes. The alucone film annealed at 750 degrees C showed an electrical resistivity of 0.55 Omega cm. Annealed MLD alucone films, which are hybrid materials, are potential candidates for applications in electronic, capacitor, and thermoelectric devices. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | A V S AMER INST PHYSICS | - |
dc.title | Air-stable alucone thin films deposited by molecular layer deposition using a 4-mercaptophenol organic reactant | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin-Seong | - |
dc.identifier.doi | 10.1116/1.5134055 | - |
dc.identifier.scopusid | 2-s2.0-85078841583 | - |
dc.identifier.wosid | 000515509200002 | - |
dc.identifier.bibliographicCitation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.38, no.2, pp.1 - 9 | - |
dc.relation.isPartOf | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.citation.title | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.citation.volume | 38 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 9 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | RAMAN-SPECTROSCOPY | - |
dc.subject.keywordPlus | GRAPHENE | - |
dc.subject.keywordPlus | GROWTH | - |
dc.subject.keywordPlus | CARBON | - |
dc.subject.keywordPlus | AL2O3 | - |
dc.subject.keywordPlus | ENCAPSULATION | - |
dc.subject.keywordPlus | POLYMER | - |
dc.subject.keywordPlus | FTIR | - |
dc.subject.keywordPlus | NANOCOMPOSITE | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.identifier.url | https://avs.scitation.org/doi/10.1116/1.5134055 | - |
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