Effect of boron/phosphorus ratio in lithium boron phosphorus oxynitride thin film electrolytes for all-solid-state thin film batteries
- Authors
- Park, Chanhwi; Lee, Sangsoo; Choi, Sunho; Shin, Dongwook
- Issue Date
- Sep-2019
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Thin film electrolyte; Lithium borate; Lithium phosphate; Lithium boron phosphorus oxynitride; All-solid-state batteries
- Citation
- THIN SOLID FILMS, v.685, pp.434 - 439
- Indexed
- SCIE
SCOPUS
- Journal Title
- THIN SOLID FILMS
- Volume
- 685
- Start Page
- 434
- End Page
- 439
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/12558
- DOI
- 10.1016/j.tsf.2019.06.055
- ISSN
- 0040-6090
- Abstract
- For application to all-solid-state thin film batteries, lithium boron phosphorus oxynitride (LiBPON) thin films were fabricated by RF magnetron sputtering technique of lithium borate (Li₃BO₃) and lithium phosphate (Li₃PO₄) target under N₂ atmosphere. To investigate the mixed former effect upon the LiBPON thin films, we prepared various films with controlled B and P contents. The LiBPON thin film formulation with nearly equal B and P contents showed the highest room-temperature lithium ionic conductivity of 3.52 x 10⁻⁶S cm⁻¹ and the lowest activation energy of 48.24 kJ mol⁻¹ owing to the mixed former effect, the increased lithium content and nitridation. Infrared spectra of the glass thin films achieved two dominant peaks corresponding to BO₃³⁻ and PO₄³⁻ unit. N1s spectra were analyzed by X-ray photoelectron spectroscopy that the increased ionic conductivities observed were related to the formation of triply coordinated nitrogen.
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