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Remote plasma atomic layer deposition of SiNx gate spacer using BDEAS and N2 plasma
- Authors
- 전형탁
- Issue Date
- 20211118
- Place
- 용인문화예술원
- Conference Name
- 2021년 추계학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)