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Thermal atomic layer deposition of Molybdenum trioxide using metal organic precursor and H2O reactant
- Authors
- 전형탁
- Issue Date
- 13-May-2021
- Place
- 광주 김대중 컨벤션센터(온라인 병행)
- Conference Name
- 2021년도 한국재료학회 춘계학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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