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Thermal atomic layer deposition of Molybdenum trioxide using metal organic precursor and H2O reactant

Authors
전형탁
Issue Date
20210513
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/135127
Place
광주 김대중 컨벤션센터(온라인 병행)
Conference Name
2021년도 한국재료학회 춘계학술대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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