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이중주파수 유도결합 플라즈마에서 모드전이 연구
- Authors
- 김주호
- Issue Date
- 5-Feb-2021
- Place
- 소노캄(제주)
- Conference Name
- The 60th Winter Annual Conference of The Korean Vacuum Society
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Collections - 서울 공과대학 > ETC > 2. Conference Papers
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