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부유 고조화 분석법 개선을 통한 플라즈마 특성 및 유전체 막 측정 방법
- Authors
- 정진욱
- Issue Date
- 27-May-2022
- Place
- 인하대 항공우주융합캠퍼스 항공우주산학융합원대강당
- Conference Name
- 2022년 반도체디스플레이 춘계학술대회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)