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Experimental Observation of plasma parameter and photoresist ashing in an inductively coupled plasma sources with MRWPT antenna
- Authors
- 정진욱
- Issue Date
- 28-Apr-2022
- Publisher
- plasma tech
- Citation
- plasma processing and technology international conference
- Conference Name
- plasma processing and technology international conference
- Place
- 스페인 바로셀로나
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)