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Effect of frequency on radial distribution of plasma potential in a dual-frequency capacitively coupled plasma
- Authors
- 정진욱
- Issue Date
- 17-Feb-2022
- Publisher
- 한국진공학회
- Citation
- 한국진공학회 제62회 동계정기학술대회
- Conference Name
- 한국진공학회 제62회 동계정기학술대회
- Place
- 강원도 횡성 웰리힐리파크
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)