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Ar/He plasma 에서의 Hysteresis 현상 변화와 E-mode에서의 전자 밀도 변화 연구

Authors
정진욱
Issue Date
18-Aug-2021
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/138208
Place
제주도 소노캄
Conference Name
한국진공학회 제61회 하계정기학술대회
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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Chung, Chin Wook
COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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