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유도 결합 플라즈마에서 그리드 시스템을 통한 전자 빔의 생성 연구

Authors
정진욱
Issue Date
18-Aug-2021
Publisher
한국진공학회
Citation
한국진공학회 제61회 하계정기학술대회
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/138209
Conference Name
한국진공학회 제61회 하계정기학술대회
Place
제주도 소노캄
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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