Development of high-efficiency capacitive discharge using magnetic resonance wireless power transfer systems
- Authors
- Kim, Ju Ho; Chung, Chin-Wook
- Issue Date
- May-2021
- Publisher
- IOP PUBLISHING LTD
- Keywords
- capacitively coupled plasma; magnetic resonance wireless power transfer; plasma diagnostics; ion density distribution; matcher efficiency
- Citation
- PLASMA SOURCES SCIENCE & TECHNOLOGY, v.30, no.5, pp.1 - 5
- Indexed
- SCIE
SCOPUS
- Journal Title
- PLASMA SOURCES SCIENCE & TECHNOLOGY
- Volume
- 30
- Number
- 5
- Start Page
- 1
- End Page
- 5
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/141984
- DOI
- 10.1088/1361-6595/abe810
- ISSN
- 0963-0252
- Abstract
- We developed a high-efficiency source in a capacitively coupled plasma using magnetic resonance wireless power transfer (MRWPT) systems, which has the advantage that the matcher efficiency is very high at low gas pressures (2 mTorr to 20 mTorr) and high density plasmas (about 1 x 10(10) cm(-3) to 5 x 10(10) cm(-3)). At the non-resonance conditions, most of the RF power is dissipated by the transmitter coil and the plasma is not discharged. However, at the resonance condition, the plasma is discharged as the current flowing through the transmitter coil rapidly decreases, and the matcher efficiency is higher than 90% in all experiments. For analysis, the transformer model with MRWPT systems is developed. The experimental result is consistent with the model, and the results are discussed with the relevant physical mechanisms.
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