Detailed Information
Cited 6 time in 
Cited 6 time in 
Cited 6 time in
Metadata Downloads
Molecular Layer Deposition of Organic-Inorganic Hybrid Films Using Diethylzinc and Trihydroxybenzene
- Authors
- Han, Kyu S.; Sung, Myung M.
- Issue Date
- Aug-2014
- Publisher
- American Scientific Publishers
- Keywords
- Atomic Layer Deposition; Molecular Layer Deposition; Organic-Inorganic Hybrid Films
- Citation
- Journal of Nanoscience and Nanotechnology, v.14, no.8, pp 6137 - 6142
- Pages
- 6
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- Journal of Nanoscience and Nanotechnology
- Volume
- 14
- Number
- 8
- Start Page
- 6137
- End Page
- 6142
- ISSN
- 1533-4880
1533-4899
- Abstract
- We fabricated organic-inorganic hybrid thin films by using molecular layer deposition with diethylzinc and benzenetriol at temperatures of 100-160 degrees C. In this MLD process, the surface reactions were found to be self-terminating and complementary enough to make a uniform, conformal, high-quality hybrid thin film. The prepared zinc oxide-crosslinked hydroxybenzene and zinc oxide nanolaminated films (ZnOHB/ZnO) exhibited good stability and field effect mobility (> 0.6 cm(2)/V . s). The MLD method is an ideal technique for fabrication of various organic-inorganic hybrid thin films.
- Files in This Item
- Go to Link
- Appears in
Collections - 서울 자연과학대학 > 서울 화학과 > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)