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Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma
- Authors
- Oh, Seung-Ju; Lee, Hyo-Chang; Chung, Chin-Wook
- Issue Date
- Aug-2015
- Publisher
- Institute of Electrical and Electronics Engineers
- Keywords
- Inductively coupled plasma (ICP); spatial plasma distribution; wireless power transfer
- Citation
- IEEE Transactions on Plasma Science, v.43, no.8, pp 2766 - 2767
- Pages
- 2
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- IEEE Transactions on Plasma Science
- Volume
- 43
- Number
- 8
- Start Page
- 2766
- End Page
- 2767
- ISSN
- 0093-3813
1939-9375
- Abstract
- In this paper, numerical calculations of the surface coil current and the spatial electric field in the vicinity of the antenna were investigated using wireless power transfer method. It is observed that the wirelessly transferred power to a resonant coil is dramatically changed with a variation of the excitation frequency. This result indicates that the spatial plasma distribution can be controlled through wireless resonance power transfer. This method could be applied to the large-area plasma source.
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)