Control of electron energy distribution by adding a pulse inductive field in capacitive discharge
DC Field | Value | Language |
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dc.contributor.author | Lee, Hyo-Chang | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-07T07:42:55Z | - |
dc.date.available | 2022-07-07T07:42:55Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2014-12 | - |
dc.identifier.issn | 0963-0252 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/143935 | - |
dc.description.abstract | Drastic changes in the electron energy distribution (EED) and the plasma parameter caused by a pulse-modulated (PM) inductive field were observed in a low-gas pressure capacitively coupled plasma (CCP). By applying a small amount of the PM inductive power (20 W) in the CCP, the effective electron temperature (T-eff) was increased without a variation of the plasma density (n(e)) due to the low energy electron heating by the inductive field. When a large amount of the PM inductive power of 50 W was applied to the CCP, both the T-eff and the n(e) were increased because of the electron heating through the coupling effect of the inductive and capacitive fields. These results show that T-eff and n(e) can be controlled independently or simultaneously in the plasmas by adding the pulse inductive field. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.title | Control of electron energy distribution by adding a pulse inductive field in capacitive discharge | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1088/0963-0252/23/6/062002 | - |
dc.identifier.scopusid | 2-s2.0-84915748791 | - |
dc.identifier.wosid | 000345781300003 | - |
dc.identifier.bibliographicCitation | PLASMA SOURCES SCIENCE & TECHNOLOGY, v.23, no.6, pp.1 - 6 | - |
dc.relation.isPartOf | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.citation.title | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.citation.volume | 23 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 6 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | HEATING-MODE TRANSITION | - |
dc.subject.keywordPlus | RF DISCHARGE | - |
dc.subject.keywordPlus | COLLISIONLESS | - |
dc.subject.keywordPlus | KINETICS | - |
dc.subject.keywordPlus | WAVES | - |
dc.subject.keywordAuthor | electron energy distribution | - |
dc.subject.keywordAuthor | pulsed plasma | - |
dc.subject.keywordAuthor | plasma parameter | - |
dc.subject.keywordAuthor | plasma control | - |
dc.identifier.url | https://iopscience.iop.org/article/10.1088/0963-0252/23/6/062002 | - |
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