Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices
- Authors
- Yoon, Jae Woong; Ma, Seong-Min; Kim, Gun Pyo; Kang, Yoonshik; Hahn, Joonseong; Kwon, Oh-Jang; Kim, Kyuyoung; Song, Seok Ho
- Issue Date
- Jan-2018
- Publisher
- NATURE RESEARCH
- Citation
- NATURE ELECTRONICS, v.1, no.1, pp.60 - 67
- Indexed
- SCIE
SCOPUS
- Journal Title
- NATURE ELECTRONICS
- Volume
- 1
- Number
- 1
- Start Page
- 60
- End Page
- 67
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/150726
- DOI
- 10.1038/s41928-017-0007-7
- ISSN
- 2520-1131
- Abstract
- Advances in nanophotonics and plasmonics have led to the creation of a variety of innovative optical components and devices. However, the development of powerful practical applications has so far been limited. Here we show that subsurface defects in three-dimensional NAND flash memory devices can be identified by exploiting the inherent hyperbolic metamaterial structure of the devices and associated nanophotonic interactions, such as the epsilon-near-zero effect and hyperbolic Bloch mode formation. By incorporating a hyperspectral imaging scheme into an industrial optical inspection tool, we experimentally demonstrate that a diffraction-assisted volume-plasmonic resonance provides a robust mechanism for identifying subsurface defects at a depth that is around ten times deeper than the conventional optical skin depth limit. Further spectral analysis in the longer-wavelength infrared region shows clear hyperbolic guided-mode-resonance signatures that would potentially allow defect identification over the entire device depth and on the scale of multiple micrometres.
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