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축전 결합 플라즈마에서 인덕터 종단에 의한 플라즈마 z축 밀도 분포 영향
- Authors
- 정진욱
- Issue Date
- 12-Aug-2019
- Publisher
- 한국진공학회
- Citation
- 제57회 하계정기학술대회
- Conference Name
- 제57회 하계정기학술대회
- Place
- 대명 비발디파크
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)