Electrode dependent interfacial layer variation in metal-oxide- semiconductor capacitor

Abstract

The interfacial layer between oxide and semiconductor in metal-oxide-semiconductor (MOS) capacitors depends on the metal electrode material. The metal/HfO2/Si and metal/HfO2/Ge capacitor were made using an atomic layer deposited HfO2 dielectric films and Mo, Ru, and Pt electrodes above Si substrate and Ti, Ru, and Pt electrodes above Ge substrate. The measured saturation capacitance was varied with electrode and evaluated to capacitance equivalent thickness (CET). In Si-based MOS capacitor, the CET value of the capacitor with Pt electrode is larger than those with Mo and Ru electrode. In addition, the CET is 27.4 A, 38.2 A, and 30.8 A for Ti, Ru, and Pt electrode, respectively, for Ge-based MOS capacitors. The CET variation with electrode is attributed the variation of dielectric constant of HfO 2 dielectric and the difference of interfacial layer. The CET variation is well in agreement with the interfacial layer thickness taken by a transmission electron microscopy. The thickness variation of interfacial layer results from the oxygen gettering ability of the electrode even though they are apart.