Investigation of the Boltzmann relation in plasmas with non-Maxwellian electron distribution
- Authors
- Kim, June Young; Lee, Hyo-Chang; Kim, Dong-Hwan; Kim, Yu-Sin; Kim, Young-Cheol; Chung, Chin-Wook
- Issue Date
- Feb-2014
- Publisher
- AMER INST PHYSICS
- Citation
- PHYSICS OF PLASMAS, v.21, no.2, pp.1 - 5
- Indexed
- SCIE
SCOPUS
- Journal Title
- PHYSICS OF PLASMAS
- Volume
- 21
- Number
- 2
- Start Page
- 1
- End Page
- 5
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/160753
- DOI
- 10.1063/1.4866158
- ISSN
- 1070-664X
- Abstract
- An experimental investigation of the Boltzmann relation at various radio frequency (RF) powers was performed in a low pressure RF inductively coupled plasma (ICP). The measured electron energy probability functions (EEPFs) show a high population of low energy electrons at low RF powers, while the population of high energy electrons is high at high RF powers. In these bi-Maxwellian EEPFs, radial variations of the electron density and the plasma potential from the center to the edge of the discharge chamber were plotted according to the Boltzmann relation with the effective temperature T-eff and the screening temperature T-s, and it was found that the Boltzmann relation with the screening temperature, rather than with the effective temperature, describes the relation between the electron density and the plasma potential.
- Files in This Item
-
Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 전기공학전공 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/160753)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.