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Results 1-9 of 9 (Search time: 0.117 seconds).
Interpolation for two-dimensional spatial distribution estimation of plasma densities in a cylindrical RF discharge reactor
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
A study on the scale up of plasma processing chamber by using global model
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
Effect of plasma density distribution for polymer surface etching at low frequency (50 kHz) O2+CF4 capacitive discharge
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
Collisionless electron heating and control of electron energy distribution by adding pulsed inductive fields in capacitively coupled plasma
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
A study on the correlations between external discharge parameters and plasma characteristics in an inductively coupled plasma using transformer circuit model
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
Spatial characteristics of plasma parameters in a weak dc magnetic field in solenoidal inductive discharge
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
A new method for measuring transferred power to plasma in inductive discharge
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
Mode transition of power dissipation in and plasma parameters in an asymmetric capacitive discharge
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
The Digital Matching System with Transformer type for 400 kHz Ferrite inductively Coupled Plasma
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
1
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2012
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