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A study on the scale up of plasma processing chamber by using global model
- Authors
- 정진욱
- Issue Date
- 4-Jul-2012
- Place
- 제주도
- Conference Name
- 4th ICMAP
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)