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Effect of Flow Rate on the Plasma Parameters in a Dual Type Inductively Coupled Plasma

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ConferenceIssue Date2013Citation9th Asian-European International Conference On Plasma Surface EngineeringPublisherAJC-APSE (Asian Joint Committee for AppliedPlaceJeju Island
Electromagnetically Coupled Resonators Using Toroidal Ferrite Core for Wireless Power Transfer

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ConferenceIssue Date2012CitationIMWS-IWPT2012PublisherIEEEPlaceKyoto, Japan
Correlation between electrical characteristics of RF bias and plasma parameters in biased inductively coupled plasmas

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ConferenceIssue Date2013Citation9th Asian-European International Conference On Plasma Surface EngineeringPublisherAJC-APSE (Asian Joint Committee for Applied Plasma Science and Engineering)PlaceJeju Island
Experimental verification of the characteristic of plasmas on the effect of antenna turns in inductively coupled plasmas

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ConferenceIssue Date2013Citation9th Asian-European International Conference On Plasma Surface EngineeringPublisherAJC-APSE (Asian Joint Committee for AppliedPlaceJeju Island
Effect of Antenna Size on the E to H Heating Mode Transition in Inductively Coupled Plasma

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ConferenceIssue Date2013Citation9th Asian-European International Conference On Plasma Surface EngineeringPublisherAJC-APSE (Asian Joint Committee for Applied Plasma Science and Engineering)PlaceJeju Island
Effect of Flow Rate related to Pressure Gradient in Plasma Process Reactor

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ConferenceIssue Date2013Citation9th Asian-European International Conference On Plasma Surface EngineeringPublisherAJC-APSE (Asian Joint Committee for AppliedPlaceJeju Island
충돌주파수가 고주파 수평행평판플라즈마의 전기장 균일도에 미치는 영향 연구

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ConferenceIssue Date2011Citation한국진공학회 하계 정기 학술대회Publisher한국진공학회Place대구 exco
A fast method for obtaining electron energy distribution function by using Savitzky Golay technique

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ConferenceIssue Date2016Citation2016 IEEE International ConferencePublisherPlasma Science (ICOPS)PlaceBanff, AB, Canada
E-H transition measurement in cylindrical ICP with external DC magnetic field

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ConferenceIssue Date2013Citation9th Asian-European International Conference On Plasma Surface EngineeringPublisherAJC-APSE (Asian Joint Committee for Applied Plasma Science and Engineering)PlaceJeju Island
Photochromic Polymer Sensor for Plasma Diagnostic

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ConferenceIssue Date2013Citation9th Asian-European International Conference On Plasma Surface EngineeringPublisherAJC-APSE (Asian Joint Committee for Applied Plasma Science and Engineering)PlaceJeju Island
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