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Results 31-40 of 343 (Search time: 0.022 seconds).
On the optimal chamber length and electron heating mechanism in low pressure inductive discharges
정진욱
Conference
Issue Date
2016
Citation
69th Annual Gaseous Electronics Conference
Publisher
American Physical Society
Place
Bochum, Germany
Ar/He plasma 에서의 Hysteresis 현상 변화와 E-mode에서의 전자 밀도 변화 연구
정진욱
Conference
Issue Date
2021
Citation
한국진공학회 제61회 하계정기학술대회
Publisher
한국진공학회
Place
제주도 소노캄
Evolution of Electron Temperature and Coupling between Electron Temperature and Power Absorption
정진욱
Conference
Issue Date
2013
Citation
66th Gaseous Electronics Conference
Publisher
American Physical Society (APS)
Place
New Jersey
유도 결합 산소 플라즈마에서 고조화파 분석법을 이용한 음이온 공간 분포 측정
정진욱
Conference
Issue Date
2013
Citation
제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)
Publisher
한국진공학회
Place
휘닉스파크
Non-invasive electrical method for measurement of electron temperature in an atmospheric pressure plasma jet source
정진욱
Conference
Issue Date
2013
Citation
66th Gaseous Electronics Conference
Publisher
American Physical Society (APS)
Place
New Jersey
Measurement of electron energy distribution functions in a low pressure and low density inductively coupled plasma
정진욱
Conference
Issue Date
2013
Citation
66th Gaseous Electronics Conference
Publisher
American Physical Society (APS)
Place
New Jersey
플라즈마에서 볼츠만 관계식의 실험적 검증
정진욱
Conference
Issue Date
2013
Citation
제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)
Publisher
한국진공학회
Place
휘닉스파크
A study of increasing radical density and etch rate using remote plasma generator system
정진욱
Conference
Issue Date
2013
Citation
66th Gaseous Electronics Conference
Publisher
American Physical Society (APS)
Place
New Jersey
펄스플라즈마에서 부유고조화를 이용하여 고시간분해능으로 플라즈마 진단방법
정진욱
Conference
Issue Date
2013
Citation
제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)
Publisher
한국진공학회
Place
휘닉스파크
A FAST METHOD FOR OBTAINING ELECTRON ENERGY DISTRIBUTION FUNCTION BY USING SAVITZKY GOLAY TECHNIQUE
정진욱
Conference
Issue Date
2016
Citation
IEEE ICOPS 2016
Publisher
IEEE Nuclear Plasma Sciences Society
Place
Banff(Canada)
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