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Multi-level resistive switching observations in asymmetric Pt/Ta2O5-x/TiOxNy/TiN/Ta2O5-x/Pt multilayer configurations

Authors
Lee, Ah RahmBae, Yoon CheolBaek, Gwang HoIm, Hyun SikHong, Jin Pyo
Issue Date
Aug-2013
Publisher
American Institute of Physics
Citation
Applied Physics Letters, v.103, no.6, pp 1 - 4
Pages
4
Indexed
SCI
SCIE
SCOPUS
Journal Title
Applied Physics Letters
Volume
103
Number
6
Start Page
1
End Page
4
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/162271
DOI
10.1063/1.4818129
ISSN
0003-6951
1077-3118
Abstract
We examine multilevel (ML) resistance switching properties in a Pt/Ta2O5-x/TiOxNy/TiN/Ta2O5-x/Pt matrix, in which two bipolar resistive switching elements Pt/Ta2O5-x/TiOxNy and TiN/Ta2O5-x/Pt are anti-serially and electrically connected. The ML features for the three assigned, distinguishable resistance states are clearly identified by using an I-V device operation scheme, indicating that the middle TiN and TiOxNy electrodes are crucial for adjusting ML resistance states. Experimental observations suggest that the ML switching events rely on electrically induced oxygen ion drifts at interfaces between the top/bottom Ta2O5-x and middle TiN/TiOxNy layers.
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