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Complementary resistive switching mechanism in Ti-based triple TiOx/TiN/TiOx and TiOx/TiOxNy/TiOx matrix

Authors
Lee, Ah RahmBae, Yoon CheolIm, Hyun SikHong, Jin Pyo
Issue Date
Jun-2013
Publisher
ELSEVIER SCIENCE BV
Keywords
ReRAM; Complementary resistive switching; Resistive switching; CRS; Titanium oxide
Citation
APPLIED SURFACE SCIENCE, v.274, pp.85 - 88
Indexed
SCIE
SCOPUS
Journal Title
APPLIED SURFACE SCIENCE
Volume
274
Start Page
85
End Page
88
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/162635
DOI
10.1016/j.apsusc.2013.02.100
ISSN
0169-4332
Abstract
We report the complementary resistive switching (CRS) origins of two hetero TiOx/TiN/TiOx and TiOx/TiOxNy/TiOx matrix, allowing for the possible memory operation without the use of selection device. Each matrix consisted of anti-serially combined bipolar switching elements 1 and 2, where one bipolar switching element 1 was Pt/topTiO(x)/bottom TiN or TiOxNy, and the other switching element 2 was top TiN or TiOxNy/bottom TiOx/Pt. The electrical properties of the two matrices suggested that the nature of CRS behaviors was based on a combination of the filamentary conduction paths in the top and bottom TiOx layers and the redox reaction induced by oxygen ion drift at the interfaces of the middle TiN and TiOxNy layers.
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