ConferenceIssue Date2011Citationthe third international conference on microelectronics and plasma technologyPublisherchinese vacuum societyPlacedalian, china
ConferenceIssue Date2011Citationthe third international conference on microelectronics and plasma technologyPublisherchinese vacuum societyPlacedalian, china
ConferenceIssue Date2011CitationThe third international conference on microelectronis and plasma technologyPublisherICMAP2011 Organizing CommitteePlacechina, Dalian