Characteristics of a-C/B:H films from non-toxic o-carborane vapor prepared by using DC glow discharges
- Authors
- Sun, Jong-Ho; Woo, Hyun-Jong; Chung, Kyu-Sun; Hong, Suk-Ho
- Issue Date
- Feb-2013
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- Boron; Thin film; Carborane
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.62, no.4, pp.612 - 618
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 62
- Number
- 4
- Start Page
- 612
- End Page
- 618
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/163506
- DOI
- 10.3938/jkps.62.612
- ISSN
- 0374-4884
- Abstract
- A non-toxic boron-containing material, carborane (C2B10H12), has been utilized to deposit amorphous hydrogenated carbon/boron (a-C/B:H) thin films in helium DC glow discharges. The helium plasma was produced at a target pressure of similar to 5 mTorr in the pulsed mode at a duty cycle of 0.375 (3 s on/5 s off) or 0.23 (3 s on/10 s off) by using a filament discharge system connected with a carborane evaporation source. Deposited a-C/B:H thin films were characterized by using variable angle spectroscopic ellipsometry, scanning electron microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The a-C/B:H thin films have soft polymer-like characteristics with optical constants of n = 1.65 and k = 10(-3) at 632 nm, and the B/C ratio inside the bulk was similar to 2 for an similar to 60% boron contents. The evaporation characteristics of carborane powder under vacuum were also investigated.
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