Thin-film transistor behaviour and the associated physical origin of water-annealed In-Ga-Zn oxide semiconductor
- Authors
- Ahn, Byung Du; Lim, Jun Hyung; Cho, Mann-Ho; Park, Jin-Seong; Chung, Kwun-Bum
- Issue Date
- Oct-2012
- Publisher
- IOP PUBLISHING LTD
- Citation
- JOURNAL OF PHYSICS D-APPLIED PHYSICS, v.45, no.41, pp.1 - 7
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Volume
- 45
- Number
- 41
- Start Page
- 1
- End Page
- 7
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/164450
- DOI
- 10.1088/0022-3727/45/41/415307
- ISSN
- 0022-3727
- Abstract
- A transparent In-Ga-Zn oxide semiconductor was thermally annealed in an ambient atmosphere of water vapour and the associated electrical and physical properties of the film were investigated. After annealing in water vapour, the resulting thin-film transistor (TFT) exhibits n-type behaviour with a field effect mobility of 11.4 cm(2) V-1 s(-1), and an on/off current ratio of 6.65 x 10(9). The annealing process in water vapour induces changes in the elemental composition and chemical bonding states of Zn and O. These phenomena affect the changes of band alignment including the band gap and conduction band offset (Delta (E-CB - E-F)) of InGaZnO semiconductors, which is the basis for the improved operation and performance of these TFTs.
- Files in This Item
-
Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/164450)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.