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ALD of Metal Oxides Fabricated by using La(No3)3·6H2O Oxidant and their Applications

Authors
안진호
Issue Date
22-Jul-2019
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/16502
Place
Bellevue, Washington, USA
Conference Name
ALD/ALE 2019
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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