Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers

Authors
Choi, GyunghyunKim, Sung-HeeHa, ChunghunBae, Suk Joo
Issue Date
Jun-2012
Publisher
TAYLOR & FRANCIS LTD
Keywords
spatial defects; neural network; pattern recognition; similarity; wafer map; yield management
Citation
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.50, no.12, pp.3274 - 3287
Indexed
SCIE
SCOPUS
Journal Title
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH
Volume
50
Number
12
Start Page
3274
End Page
3287
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/165381
DOI
10.1080/00207543.2011.574502
ISSN
0020-7543
Abstract
The integrated circuits (ICs) on wafers are highly vulnerable to defects generated during the semiconductor manufacturing process. The spatial patterns of locally clustered defects are likely to contain information related to the defect generating mechanism. For the purpose of yield management, we propose a multi-step adaptive resonance theory (ART1) algorithm in order to accurately recognise the defect patterns scattered over a wafer. The proposed algorithm consists of a new similarity measure, based on the p-norm ratio and run-length encoding technique and pre-processing procedure: the variable resolution array and zooming strategy. The performance of the algorithm is evaluated based on the statistical models for four types of simulated defect patterns, each of which typically occurs during fabrication of ICs: random patterns by a spatial homogeneous Poisson process, ellipsoid patterns by a multivariate normal, curvilinear patterns by a principal curve, and ring patterns by a spherical shell. Computational testing results show that the proposed algorithm provides high accuracy and robustness in detecting IC defects, regardless of the types of defect patterns residing on the wafer.
Files in This Item
Go to Link
Appears in
Collections
서울 공과대학 > 서울 산업공학과 > 1. Journal Articles
서울 기술경영전문대학원 > 서울 기술경영학과 > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Bae, Suk Joo photo

Bae, Suk Joo
COLLEGE OF ENGINEERING (DEPARTMENT OF INDUSTRIAL ENGINEERING)
Read more

Altmetrics

Total Views & Downloads

BROWSE