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실리콘 카바이드(SiC) CMP 슬러리의 연구 동향
- Issue Date
- Apr-2012
- Publisher
- 대한금속재료학회
- Citation
- 재료마당, v.25, no.2, pp.17 - 21
- Indexed
- OTHER
- Journal Title
- 재료마당
- Volume
- 25
- Number
- 2
- Start Page
- 17
- End Page
- 21
- Files in This Item
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- Appears in
Collections - 서울 공과대학 > 서울 융합전자공학부 > 1. Journal Articles
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