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Heteroepitaxial Growth of GaN on Various Powder Compounds (AlN, LaN, TiN, NbN, ZrN, ZrB2, VN, BeO) by Hydride Vapor Phase Epitaxy

Authors
Park, JinsubHa, Jun-SeokHong, Soon-KuLee, Seog WooCho, Meoung WhanYao, TakafumiLee, Hae WooLee, Sang HwaLee, Sung-KeunLee, Hyo-Jong
Issue Date
Apr-2012
Publisher
KOREAN INST METALS MATERIALS
Keywords
GaN; heteroepitaxy; powder; hydride vapor phase epitaxy
Citation
ELECTRONIC MATERIALS LETTERS, v.8, no.2, pp.135 - 139
Indexed
SCIE
SCOPUS
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OTHER
Journal Title
ELECTRONIC MATERIALS LETTERS
Volume
8
Number
2
Start Page
135
End Page
139
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/165932
DOI
10.1007/s13391-012-1076-4
ISSN
1738-8090
Abstract
We investigated the nucleation and growth behavior of GaN on various powders by hydride vapor phase epitaxy. In relative comparison, the nucleation tendency of GaN on each powder can be summarized as AlN > LaN, TiN, NbN > ZrN > ZrB2 > VN, BeO, indicating that the number of nucleation sites increased from right to left. LaN and NbN have not yet been reported as buffer materials for GaN growth. Of these, NbN is expected to be a good buffer material because the interatomic distance on the NbN (111) plane has only 2% difference from that on the GaN (0001) plane.
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COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)
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