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Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization
- Issue Date
- Sep-2011
- Publisher
- Electrochemical Society, Inc.
- Citation
- Electrochemical and Solid-State Letters, v.14, no.11, pp H450 - H452
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- Electrochemical and Solid-State Letters
- Volume
- 14
- Number
- 11
- Start Page
- H450
- End Page
- H452
- ISSN
- 1099-0062
1944-8775
- Abstract
- The corrosion inhibition effect of different nonionic polymers, which are polyacrylamide (PAM), polyvinyl pyrrolidone (PVP), and polyvinyl alcohol (PVA), on polycrystalline Ge2Sb2Te5 (pc-GST) was investigated in an alkaline media for chemical mechanical planarization. The adsorption affinity and inhibition effect of nonionic polymers on pitting corrosion were observed using x-ray photoelectron spectroscopy and a potentiodynamic polarization curve, respectively. We found that PVP was more effective than the others in inhibiting the pitting corrosion of pc-GST film in the alkaline media.
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