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Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting

Authors
Ko, Ki-YoungHer, Eun-JinNichols, William T.Lee, HeonDo, Young RagAhn, Jinho
Issue Date
Sep-2011
Publisher
ELSEVIER
Keywords
Nano-imprint; PDMS stamp; Photonic crystal; Thin-film phosphor; Sol-gel
Citation
MICROELECTRONIC ENGINEERING, v.88, no.9, pp.2930 - 2933
Indexed
SCIE
SCOPUS
Journal Title
MICROELECTRONIC ENGINEERING
Volume
88
Number
9
Start Page
2930
End Page
2933
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/167664
DOI
10.1016/j.mee.2011.03.162
ISSN
0167-9317
Abstract
The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y2O3:Eu3+ sol into a Y2O3:Eu3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor.
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COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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