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The 10th Asia-Pacific conference on Plasma Science and Technology (APCPST 2010): The 153rd symposium on Plasma Science for Materials (SPSM 2010)

Authors
Chae, H.Y.Chung, Chin WookChung, J.W.Hong, M.P.Joo, J.H.Kim, H.J.Kim, D.H.Kusano, E.Overzet, L.Pu, Y.-K.Setsuhara, Y.Shi, J.J.Terashima, K.Watanabe, T.
Issue Date
Aug-2011
Publisher
ELSEVIER
Citation
Thin Solid Films, v.519, no.20, pp.6637 - 6638
Indexed
SCIE
SCOPUS
Journal Title
Thin Solid Films
Volume
519
Number
20
Start Page
6637
End Page
6638
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/167918
DOI
10.1016/j.tsf.2011.06.001
ISSN
0040-6090
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서울 공과대학 > 서울 전기공학전공 > 1. Journal Articles

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