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유도 결합 플라즈마 이온 주입 장치 구조 열 전달 해석
- Authors
- 문승재
- Issue Date
- 30-Nov-2021
- Place
- 세종대학교 컨벤션센터
- Conference Name
- 2021 동계학술발표대회
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Moon, Seung Jae
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)