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P2-13: Field emission characteristics of carbon nanotube forest on etched Si substrate

Authors
Lee, JungwooPark, TaeheeLee, JongtaekAhn, JuwonShin, MingyeongYi, Whikun
Issue Date
Jul-2010
Publisher
IEEE
Keywords
Carbon nanotube; Chemical etched Si substrate; Field emission
Citation
23rd International Vacuum Nanoelectronics Conference, IVNC 2010, pp.147 - 148
Indexed
SCOPUS
Journal Title
23rd International Vacuum Nanoelectronics Conference, IVNC 2010
Start Page
147
End Page
148
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/174447
DOI
10.1109/IVNC.2010.5563155
ISSN
0000-0000
Abstract
In this work, we investigatethe field emission characteristics of carbon nanotube forest on three types substrate: (1) mirror polished, (2) chemically etched (large pattern) and (3) chemically etched (small pattern) Si substrate. The surface morphology of CNTs forest was characterized by scanning electron microscopy (SEM), surface chemical state and electronic structure phase analyzed by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy.
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