P2-13: Field emission characteristics of carbon nanotube forest on etched Si substrate
- Authors
- Lee, Jungwoo; Park, Taehee; Lee, Jongtaek; Ahn, Juwon; Shin, Mingyeong; Yi, Whikun
- Issue Date
- Jul-2010
- Publisher
- IEEE
- Keywords
- Carbon nanotube; Chemical etched Si substrate; Field emission
- Citation
- 23rd International Vacuum Nanoelectronics Conference, IVNC 2010, pp.147 - 148
- Indexed
- SCOPUS
- Journal Title
- 23rd International Vacuum Nanoelectronics Conference, IVNC 2010
- Start Page
- 147
- End Page
- 148
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/174447
- DOI
- 10.1109/IVNC.2010.5563155
- ISSN
- 0000-0000
- Abstract
- In this work, we investigatethe field emission characteristics of carbon nanotube forest on three types substrate: (1) mirror polished, (2) chemically etched (large pattern) and (3) chemically etched (small pattern) Si substrate. The surface morphology of CNTs forest was characterized by scanning electron microscopy (SEM), surface chemical state and electronic structure phase analyzed by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy.
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