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Roles of interfacial TiOxN1-x layer and TiN electrode on bipolar resistive switching in TiN/TiO2/TiN frameworks

Authors
Kwak, June SikDo, Young HoBae, Yoon CheolIm, Hyun SikYoo, Jong HeeSung, Min GyuHwang, Yun TaekHong, Jin Pyo
Issue Date
May-2010
Publisher
American Institute of Physics
Citation
Applied Physics Letters, v.96, no.22, pp 1 - 3
Pages
3
Indexed
SCI
SCIE
SCOPUS
Journal Title
Applied Physics Letters
Volume
96
Number
22
Start Page
1
End Page
3
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/175072
DOI
10.1063/1.3442499
ISSN
0003-6951
1077-3118
Abstract
Reversible counter-clockwise and clockwise resistive switching in a TiN/TiO2/TiN structure was studied by different polarities of bias voltage. The nature of the bipolar switching phenomenon is related to the creation and annihilation of filament paths caused by redox reactions at locally confined interfaces between the TiO2 layer and TiN electrode. The analysis of electron energy loss spectroscopy (EELS) confirmed the formation of interfacial TiOxN1-x layer between the TiO2 and TiN bottom electrode. The TiOxN1- x layer reduces current levels of ON and OFF states by partially blocking oxygen ion drift to the TiN bottom electrode.
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