Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma
- Authors
- Lee, Hyo-Chang; Lee, Jung-Kyu; Chung, Chin-Wook
- Issue Date
- Mar-2010
- Publisher
- AMER INST PHYSICS
- Citation
- PHYSICS OF PLASMAS, v.17, no.3, pp.1 - 5
- Indexed
- SCIE
SCOPUS
- Journal Title
- PHYSICS OF PLASMAS
- Volume
- 17
- Number
- 3
- Start Page
- 1
- End Page
- 5
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/175325
- DOI
- 10.1063/1.3361199
- ISSN
- 1070-664X
- Abstract
- Electron energy distribution function (EEDF) measurements were conducted in nitrogen gas inductively coupled plasma (ICP). At a low ICP power (capacitive mode) and a high gas pressure, the measured EEDF had an unusual distribution with a hole near this electron energy of 3 eV. This distribution is primarily due to vibrational excitation collisions because the vibrational cross section has a sharp peak at the electron energy in nitrogen gas. However, the EEDF evolved into a Maxwellian distribution and the hole disappeared, when the discharge mode transition from E mode to H mode occurred. This evolution of the EEPF can be understood by the electron-electron collision effect, and it occurs when the electron-electron collision time become shorter than the electron residence time.
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