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MoO3 thin film synthesis by chemical vapor transport of volatile MoO3(OH)(2)
- Authors
- Lee, Young Jung; Park, Chang Won; Kim, Dae-Gun; Nichols, William T.; Oh, Sung-Tag; Kim, Young Do
- Issue Date
- Feb-2010
- Publisher
- 세라믹공정연구센터
- Keywords
- Molybdenum oxide; Hydrogen reduction; Chemical vapor transport; heat-treatment
- Citation
- Journal of Ceramic Processing Research, v.11, no.1, pp 52 - 55
- Pages
- 4
- Indexed
- SCI
SCIE
SCOPUS
KCI
- Journal Title
- Journal of Ceramic Processing Research
- Volume
- 11
- Number
- 1
- Start Page
- 52
- End Page
- 55
- ISSN
- 1229-9162
2672-152X
- Abstract
- Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the Chemical vapor transport of MoO3(OH)(2) and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform similar to 1 mu m thickness was obtained. The effect of the annealing temperature is discussed.
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