Molecular layer deposition of ZrO2-based organic-inorganic nanohybrid thin films for organic thin film transistors
- Authors
- Lee, Byoung H.; Im, Kyo K.; Lee, Kwang H.; Im, Seongil; Sung, Myung M.
- Issue Date
- May-2009
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Organic-inorganic nanohybrid thin films; Molecular layer deposition; Atomic layer deposition; Self-assembled organic monolayers; Organic thin film transistor
- Citation
- THIN SOLID FILMS, v.517, no.14, pp.4056 - 4060
- Indexed
- SCIE
SCOPUS
- Journal Title
- THIN SOLID FILMS
- Volume
- 517
- Number
- 14
- Start Page
- 4056
- End Page
- 4060
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/176881
- DOI
- 10.1016/j.tsf.2009.01.173
- ISSN
- 0040-6090
- Abstract
- Molecular layer deposition (MLD) technique can be used for preparation of various organic-inorganic nanohybrid superlattices at a gas-phase. The MLD method is a self-controlled layer-by-layer growth process under vacuum conditions, and is perfectly compatible with the atomic layer deposition (ALD) method. In this paper, we fabricated a new type organic-inorganic nanohybrid thin film using MLD method combined with ALD. A self-assembled organic layer (SAOL) was formed at 170 degrees C using MLD with repeated sequential adsorptions of C=C terminated alkylsilane and zirconium hydroxyl with ozone activation. A ZrO2 inorganic nanolayer was deposited at the same temperature using ALD with alternating surface-saturating reactions of Zr(OC(CH3)(3))(4) and H2O. The prepared SAOL-ZrO2 organic-inorganic nanohybrid films exhibited good mechanical stability, excellent insulating properties, and relatively high dielectric constant k (similar to 16). They were then used as a 23 nm-thick dielectric for low voltage pentacene-based thin film transistors, which showed a maximum field effect mobility of 0.63 cm(2)/V s, operating at - 1 V with an on/off current ratio of similar to 10(3).
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