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Hydrogen Plasma Treatment of ZnO Thin Films Grown by Using Pulsed Laser Deposition

Authors
Song, HooyoungKim, Jae-HoonKim, Eun KyuHa, JaehwanHong, Jin PyoChu, HongLee, Cheon
Issue Date
Nov-2008
Publisher
KOREAN PHYSICAL SOC
Keywords
ZnO; Hydrogen doping; Photoluminescence
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.53, no.5, pp.2540 - 2543
Indexed
SCIE
SCOPUS
KCI
Journal Title
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume
53
Number
5
Start Page
2540
End Page
2543
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/177717
DOI
10.3938/jkps.53.2540
ISSN
0374-4884
Abstract
The effects of hydrogen plasma treatment were investigated by using the low temperature (10 K) photoluminescence spectra and Hall-effect measurements in the van der Pauw geometry. The hydrogen plasma introduced changes into both the electrical and the optical properties of ZnO. The UV emission intensity at 3.37 eV was increased by more than an order of magnitude when the ZnO sample was exposed to a hydrogen plasma for 1 min. From a comparison between the sample annealed at 800 degrees C and the sample annealed at 1000 degrees C, which have different initial defect concentrations, we demonstrate that the hydrogen doping process passivates the nonradiative recombination centers.
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