Resistance switching characteristics for nonvolatile memory operation of binary metal oxides
- Authors
- Park, In Sung; Kim, Kyong Rae; Lee, Sangsul; Ahn, Jinho
- Issue Date
- Apr-2007
- Publisher
- INST PURE APPLIED PHYSICS
- Keywords
- resistance switching effect; resistance random access memory; binary metal oxide; dielectric constant
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.46, no.4B, pp.2172 - 2174
- Indexed
- SCIE
SCOPUS
- Journal Title
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
- Volume
- 46
- Number
- 4B
- Start Page
- 2172
- End Page
- 2174
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/180272
- DOI
- 10.1143/JJAP.46.2172
- ISSN
- 0021-4922
- Abstract
- The resistance switching behaviors Of SiO2, HfO2, and TiO2 are investigated to elucidate their universal physical origins. It is demonstrated that a multideposition film fabrication process consisting of repeated thin film deposition and low-temperature annealing in O-2 ambient leads to superior resistance switching behaviors, such as forming-free switching characteristics, low switching voltage, and high resistance ratio of low- and high-resistance states compared with the conventional sputtered TiO2 film. From the resistance switching characteristics of binary metal oxide films, it is also observed that the device operation parameters, including reset/set voltages and resistance ratio, are related to the dielectric constants of the oxides.
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