Advanced technologies for estimation of nonlinear ultrasonic parameter
- Authors
- Jhang, Kyung Young; Sasaki, Kimio; Ha, Job; Tanaka, Hiroaki
- Issue Date
- Dec-2006
- Publisher
- Trans Tech Publications Ltd
- Keywords
- Bispectrum; Nonlinear parameter; Periodogram; Power spectrum; Signal processing; Ultrasonic nonlinearity
- Citation
- Key Engineering Materials, v.326-328 I, pp.673 - 676
- Indexed
- SCOPUS
- Journal Title
- Key Engineering Materials
- Volume
- 326-328 I
- Start Page
- 673
- End Page
- 676
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/180626
- DOI
- 10.4028/www.scientific.net/KEM.326-328.673
- ISSN
- 1013-9826
- Abstract
- This paper proposes an advanced signal processing technique for the precise estimation of a nonlinear ultrasonic parameter, based on power spectral and bispectral analysis. The power spectrum and bispectrum estimation of the pulse-like ultrasonic signal used in the commercial SAM (scanning acoustic microscopy) equipment is especially considered in this study. The usefulness of the proposed estimation is confirmed by experiments for a Newton ring with a continuous air gap and a real semiconductor sample with local delaminations. The results show that the nonlinear parameter obtained by the proposed method had a good correlation with the delamination.
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