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The incident angle effect of al adatom on the growth morphology of Al/Ni(001) system: Molecular dynamics simulation

Authors
Lee, Soon-gunChung, Yong Chae
Issue Date
May-2006
Publisher
IEEE
Citation
INTERMAG 2006 - IEEE International Magnetics Conference, pp.167 - 167
Indexed
SCOPUS
Journal Title
INTERMAG 2006 - IEEE International Magnetics Conference
Start Page
167
End Page
167
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/181479
DOI
10.1109/INTMAG.2006.375667
ISSN
0000-0000
Abstract
The deposition behavior of Al atoms on Ni(001) substrate for various adatom incident angle and incident energy is investigated in this study using molecular dynamics simulation to investigate the growth morphology and the quality of thin film in atomic level. Results show that the surface roughness is comparatively decreased irrespective of adatom incident angle at the incident energy of 6 eV.
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